Описание

3D Auto Measurement Unit (S5 Stage)
Model VHX-S15H
Motor 5-phase stepping motor
Positioning accuracy 6 µm*1
Repeatability ±0.5 µm*1
Stage stroke distance 15 mm
Resolution 0.05 µm/pulse
Load capacity 5 kg
Rating Power voltage 100 to 240 VAC, 50/60 Hz
Power consumption 70 VA
Environmental resistance Ambient temperature +5 to +40 °C
Relative humidity 35 to 80 % RH (No condensation)
Weight 1.3 kg
*1 Positioning accuracy and repeatability specifications apply to the motorised stage
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